| Week of: |
Week # |
Lecture |
Reading |
| 9/8/03 |
1 |
Introduction to MEMS and their Applications. |
Ch 1 |
| 9/15/03 |
2 |
Overview of IC Fabrication Technology. |
|
| 9/22/03 |
3 |
Application Specific MEMS.
Assignment #1. |
Ch 2 |
| 9/29/03 |
4 |
Design of MEMS. |
|
| 10/6/03 |
5 |
Introduction to Micromachining: Bulk Micromachining.
Assignment #2. |
Ch 3 |
| 10/13/03 |
6 |
Introduction to Micromachining: Surface Micromachining. |
|
| 10/20/03 |
7 |
Other Fabrication Techniques.
PROPOSAL DUE.
Assignment #3. |
|
| 10/27/03 |
8 |
Examples of Mechanical Microsystems. |
Ch 4 |
| 11/3/03 |
9 |
Examples of Mechanical Microsystems (cont.).
Assignment #4. |
|
| 11/10/03 |
10 |
Examples of Thermal Microsystems. |
|
| 11/17/03 |
11 |
Scaling, Power, and OPtical Systems |
|
| 11/24/03 |
12 |
Bonding,Packaging, and Sacrificial Processes; MEMS Packaging; System Integration. |
Ch 6 |
| 12/1/03 |
13 |
Packaging of Microfluidic and Optical Systems; RF, Electrical, and Magnetic Microsystems;Future Directions. |
Ch 5 |
| 12/8/03 |
14 |
PROJECT IS DUE - Each group will present their project orally to all students in the class. |
|
| FINAL |
15 |
FINAL EXAM - MONDAY, 12/15/03, 4-6 PM |
