Useful References

• vi Cheatsheet -UNIX text editor.
• UNIX Cheatsheet - Useful shortcuts to common UNIX tasks.

MEMS Course Handouts

• Homework 1
  • Crystal Origami
  • Richard Feynman - "There's Plenty of Room at the Bottom"
  • Kurt Peterson - "Silicon as a Mechanical Material"
• Homework 2
  • Kovacs(pp. 205-207) - Out-of-Plane Mechanisms
  • MUMPs Design Handbook
  • Intellisuite Example (Cantilever)

CAD Tools

Tutorials/Guides

VLSI-Related Websites

• The University of Idaho Links to VLSI Information Page
• Chip Shots: Integrated Circuits Under the Microscope (Florida State)
• Intel Technology Journal - contains many interesting articles about chip technology and manufacturing.
• Microdesign Resources Online - Homepage for publisher of Microprocessor Report, a newsletter which describes what's going on in the microprocessor industry.
• EDA Industry Working Groups

Course Related Links

• Useful Web-based MEMS Tutorials
  • Danny Banks's Introduction to Microengineering
  • About MEMS Technology
  • Multi User MEMS Processes (MPUMPs): a foundry service for MEMS community from Cronos
• MEMS and Nanotechnology at UTD and North Texas
  • Dr. J-B. Lee Group MEMS Research (UTD)
  • UTD Nanotech Institute
  • UTD Chemistry's Paul Pantano Lab
  • Zyvex Corporation
  • Texas Nanotechnology Initiative
  • Texas Instrument's DMD (Digital Micromirror Device)
• MEMS at Other Schools
  • Berkeley Sensor & Actuator Center
  • MIT Microsystems Technology Laboratories
  • MEMS @ UCLA
  • University of Michigan MEMS
  • Caltech Yu Chong Tai Group
  • Carnegie Mellon University MEMS
  • Georgia Tech MEMS
  • University of Colorado MEMS Group
  • University of Cincinnati BioMEMS
  • University of Illinois at Urbana/Champaign MEMS
  • EPFL MEMS
  • ETH MEMS
  • ETH MEMS
• MEMS at DoD and Naional Labs
  • Sandia National Lab MEMS Homepage
  • DARPA Microsystems Technology Office (MTO) Homepage
• MEMS in industry
  • MEMS Industry Group
  • Analog Devices MEMS Division
  • Coventor
  • Intellisense
  • MEMSCAP.com
  • Lucas Novasensor
  • MEMGEN
  • Intel's MEMS
  • Even Microsoft is working on MEMS? Come on!
  • IBM Zurich Research Lab
  • IBM Almaden Research Lab
  • Xerox PARC MEMS
  • Nanogen
  • Aclara Bioscience
• Miscellaneous Links
  • MEMS Clearinghouse Homepage
  • Extensive List of Web Sites for MEMS
• MEMS Simulation Softwares and Mechanical Analysis Tools
  • UC Berkeley SUGAR
  • Carnegie Mellon Univ's MEMS Synthesis Page
  • Formulae Home at Engineering Fundamentals.com
  • ANSYS Finite Element Analysis
  • FEM Links
• MEMS Database
  • Poly-Si mechanical properties
  • Physical properties of silicon
• General Semiconductor Related Links
  • Semiconductor Research Corporation (SRC)
  • Semiconductor Subway
  • Semi Web
  • SEMATECH
  • Semiconductor Online
  • Semiconductor Net
  • Solid State Technology Magazine
  • VLSI Information Links
  • VLSI Related Courses Links
  • UTD EE6322 - Semiconductor Processing Technology Class Homepage